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China develops prototype EUV machine

Chinese scientists have built a prototype EUV lithography machine, per Reuters.

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1 verified
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China
Updated
Friday, 19 June 2026 at 07:04 UTC
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Reuters reported in December that Chinese scientists have developed a prototype of an extreme ultraviolet (EUV) lithography machine, built by a team of former engineers from ASML. The effort has been described as China's version of the Manhattan Project, highlighting the strategic importance of domestic chip manufacturing capabilities. This development comes amid ongoing tensions over ASML's export controls and U.S. concerns that an EUV machine may have already reached China.
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